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Galvanometer Scanners

HS-15 Flexure-Based Galvanometer

Exceptionally smooth; ideal for raster imaging applications

Nutfield Technology’s HarmonicScan-15 (HS-15) flexure-based, moving-magnet galvanometers with capacitive position sensing offer exceptionally smooth scanning and long service life for the most challenging galvanometer applications such as small scan angle, high-duty cycle raster imaging and printing. When integrated with Nutfield’s QD-4000 servo amplifier, the HS-15 galvanometer scanners deliver excellent speed and accuracy.

  • Recommended apertures7mm, 10mm, 15mm
  • Product familyFlexure-Based Galvos
Nutfield Technology HS-15 Flexure-Based Galvanometer

Overview

Contact Nutfield Technology for assistance with identifying a solution for your scanning application.

Key Features

Key features of the HS-15 Flexure-Based Galvanometer:

  • Aperture range – 7mm, 10mm and 15mm
  • Cross Flexure Pivot replaces ball bearings
  • Ideal for raster applications
  • Excellent cross-axis repeatability
  • Flexure pivot reduces on-axis jitter
  • No lubricants – useful in vacuum applications
  • Extended life in small angle applications

Specifications

Values as published by Nutfield Technology.

Specifications for the HS-15 Flexure-Based Galvanometer:

Specifications:Value
Mechanical Specifications:HS-15 Flexure-Based Galvanometer
Rated Excursion – Raster±20*
Rated Excursion – Vector±10*
Rotor Inertia 0.34 gm-cm²
Torque Constant
dyne-cm/amp
40*10³/62*10³
Electrical Specifications:
Coil Resistance1.3/3.8 ohm
Coil Inductance (@ 1kHz)85/255 µh
Position Detector:
Angular Sensitivity100 µ amp/°
Linearity>99.9%
Gain Drift30 ppm/°C
Offset Drift10 µrad/°C
Repeatability5 µrad
Dynamic Performance:
Step Response Time
(1% of full scale, 99% settled)
10mm (Si) X-Mirror300 µs
15mm X-Mirror720 µs
Cable lengths available:0.43 to 0.6m
Installation:electrically insulated
Storage Temperature:10 to 50°C
Operating Temperature:0 to 40°C noncondensing
All specifications are using Nutfield Tech’s QD-4000 Servo Amplifier.
* Due to spring force inherent in the cross flexure pivots, some types of motion are not recommended. Continuous raster scanning can be performed at
larger angles than vector or point-and-hold applications.

Applications

Nutfield’s HS-15 Galvos are ideal for the following applications:

  • Instrumentation
  • Polygon Facet Correction
  • Imaging
  • Marking

Ideal for high-duty cycle or small angle applications

Excellent for high-resolution imaging applications

Accessories

Accessories available for the HS-15 Galvanometer:

Downloads

Documentation for the HS-15 Flexure Galvanometer:

  • Nutfield Technology’s HS-15 and SS-30 Flexure Galvanometer Scanners Data Sheet

U.S. patents apply to this product. For details, visit our Virtual Patent Marking page.

Need help choosing the right scanning solution?

Contact Nutfield Technology for assistance with identifying a solution for your scanning application.